Noise suppression methods for optical quantum sensors in Micro-Electro-Mechanical System (MEMS) vibration monitoring
光量子传感器在微型机电系统（MEMS）振动监测中的噪声抑制方法

摘要

光量子传感器凭借高灵敏度与低漂移优势，在微型机电系统（MEMS）振动监测领域展现出广阔应用潜力。然而，其测量过程易受环境噪声、机械耦合干扰及自身噪声的影响，导致信号质量下降。本文以提升MEMS振动监测的信噪比为核心目标，深入分析量子测量噪声特性，并结合MEMS结构的振动响应规律，构建基于量子纠缠光源的相干检测方案，配合多级滤波与信号融合策略，实现对低频背景噪声和高频随机噪声的协同抑制。研究表明，该方法能够在不增加传感器体积和能耗的情况下，有效提升监测精度与系统稳定性，为高精度微振动检测在航天、精密制造及结构健康监测等领域的工程化应用提供可靠技术支撑。

Abstract

Optical quantum sensors, with their advantages of high sensitivity and low drift, show broad application potential in the field of micro-electro-mechanical system (MEMS) vibration monitoring. However, their measurement process is susceptible to environmental noise, mechanical coupling interference, and intrinsic noise, leading to degradation in signal quality. Focusing on improving the signal-to-noise ratio of MEMS vibration monitoring, this paper conducts an in-depth analysis of the characteristics of quantum measurement noise. Combined with the vibration response laws of MEMS structures, it constructs a coherent detection scheme based on quantum entangled light sources, and integrates multi-stage filtering and signal fusion strategies to achieve collaborative suppression of low-frequency background noise and high-frequency random noise. The research shows that this method can effectively improve monitoring accuracy and system stability without increasing the sensor volume and energy consumption, providing reliable technical support for the engineering application of high-precision micro-vibration detection in fields such as aerospace, precision manufacturing, and structural health monitoring.