Research on piezoelectric ceramic micro-feed control algorithm for ultra-precision machine tools
超精密机床压电陶瓷微进给控制算法研究

摘要

超精密加工技术对现代制造业的高精度需求提出了更高挑战，其中压电陶瓷微进给控制系统在实现纳米级加工精度方面起着关键作用。本文围绕超精密机床中压电陶瓷驱动装置的控制算法展开研究，旨在提升其动态响应速度与定位精度。通过分析压电陶瓷的非线性特性，提出一种融合PID控制与前馈补偿的复合控制策略，并结合仿真与实验验证该方法的有效性。研究表明，所设计控制算法能显著减小滞后误差，提高系统的稳定性和重复定位精度，为超精密加工提供理论支持和技术保障。

Abstract

Ultra-precision machining technology poses higher challenges to the high-precision requirements of modern manufacturing, in which the piezoelectric ceramic micro-feed control system plays a key role in achieving nanometer-level machining accuracy. This paper focuses on the research of control algorithms for piezoelectric ceramic driving devices in ultra-precision machine tools, aiming to improve their dynamic response speed and positioning accuracy. By analyzing the nonlinear characteristics of piezoelectric ceramics, a composite control strategy integrating PID control and feedforward compensation is proposed, and the effectiveness of this method is verified through simulation and experiments. The research shows that the designed control algorithm can significantly reduce hysteresis errors, improve the stability and repeat positioning accuracy of the system, providing theoretical support and technical guarantee for ultra-precision machining.